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Vacuum Sealing (Oxygen Removal) Furnace

○ Product Details

1. Product Application

Mainly used for 3-6 inch III-V compound semiconductor crystal materials in high vacuum state for oxygen-free sealing process, equipped with automatic control system.


2. Technical Parameters:

Equipment Performance Indicators

1

Number of Workstations

1 tube (can be designed according to actual production process)

2

Rated Temperature

1000℃

3

Processable Crystal Material Size

2-6 inches

4

Working Vacuum Level

≤10X10-4Pa (adjustable)

5

Alarm Method

Over-temperature alarm, thermocouple break alarm, vacuum failure alarm, vacuum chamber pressure abnormality alarm.

6

Control System Structure

Integrated industrial control computer + PLC


3. Main Features and Advantages of Equipment

1. Capable of querying historical temperature records; historical data and temperature curves.

2. Curve viewing function: Features temperature, gas, power, vacuum level viewing capabilities.

3. Manual/automatic control function: Includes temperature, gas, power settings, and valve control functions.

4. Alarm viewing function: Capable of querying alarm types.

5. Power limit protection: Different temperatures can be set with different maximum power limits.

6. Hierarchical management: Different personnel can modify parameters based on login status.

7. Data export function: Can export recorded temperature and flow data to a USB drive.

The system hardware has highly flexible expansion capabilities, conveniently adding functions such as boat driving control and gas flow meter control for various furnaces.

○ Company Profile

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Qingdao Yuhao Microelectronics Equipment Co., Ltd. was established in 2008 as a high-tech enterprise integrating R&D, manufacturing, and sales. The company specializes in electric heating furnace equipment, heating furnace thermal fields, and graphite tool processing. Our products and services cater to various industries including electronic components, semiconductor materials, and solar photovoltaic sectors.

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Yuhao is a national high-tech enterprise and a provincial specialized and innovative SME. We hold trademark registration rights and import/export operation licenses, having passed ISO9001 quality management system certification with over 45 patents.

○ Company Certifications

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